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Advances in Imaging and Electron Physics,143

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Advances in Imaging and Electron Physics,143

Peter Hawkes

ISBN 0120147858
Pages 264

Advances in Imaging and Electron Physics merges two long-running serials-Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. This series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains.

Electron-Beam-Induced Nanometer-Scale Deposition (C.W. Hagen, N. Silvis-Cividjian). Introduction. Electron-Beam-Induced Deposition: A Literature Survey. The Theory of EBID Spatial Resolution. The Role of Secondary Electrons in EBID. Delocalization Effects in EBID. Conclusions. References. Index.