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Advances in Imaging and Electron Physics (Volume 102)

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Advances in Imaging and Electron Physics (Volume 102)

Tom Mulvey, Benjamin Kazan, Peter Hawkes

ISBN 0120147440
Pages 330

Advances in Imaging and Electron Physics merges two long-running serials--Advances in Electronics and Electron Physics and Advances in Optical & Electron Microscopy. The series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains.

Contributors. Preface. R. Albanese and G. Rubinacci, Finite Element Methods for the Solution of 3D Eddy Current Problems: Introduction. Field Equations and Material Properties. Fields, Potentials, and Gauges. Edge Elements for 3D Field Problems. Integral Formulations for Linear and Nonlinear Eddy Currents. Differential Formulations and Constitutive Error Approach. Discussion and Conclusions. Acknowledgments. References. W. Chen and H. Ahmed, Nanofabricationfor Electronics: Introduction. Nanofabrication Methods. Pattern Transfer. Resolution Limit of Organic Resists. Applications of Nanostructures. References. A.D. Feinerman and D.A. Crewe, Miniature Electron Optics: Introduction. Scaling Lawsfor Electrostatic Lenses. Review. Fabrication of Miniature Magnetostatic Lenses. Electron Source. Detector. Electron Optical Calculations. Performance of a Stacked Einzel Lens. Summary and Future Prospects. References. S.A. Nepijko and N.N. Sedov, Aspects of Mirror Electron Microscopy: Introduction. Resolution of Mirror Electron Microscope. Distortion of Details of Object Image Under Observation in Mirror Electron Microscope. Limiting Sensitivity of Mirror Electron Microscope under Observation of Steps on Object. Image of Islands on Object Surfaces in Mirror Electron Microscope. Calculation of Image Contrast in Mirror Electron Microscope in the Focused Operation Mode. Conclusions. Acknowledgment. References. Subject Index.